In-situ monitoring of the electrochemical growth of nanoporous silica

Blaffart, Frédéric;Sbille, Isabelle;Santoro, Ronny;Proost, Joris
(2011) 2011 European Materials Research Society Spring Meeting, Symposium on the Synthesis, Processing and Characterization of Nanoscale Multi-functional Oxide Films — Location: Nice, France (9.May.2011)

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Anodizing of silicon in hydrofluoric acid solutions is well-known to result in silicon oxidation and subsequent electrodissolution. The associated voltage oscillations observed under galvanostatic conditions have been associated with periodic silica thickness variations. Under specific conditions, such as non-acidic electrolytes, it is also possible to electrochemically grow nanoporous silica films. As silicon is widely use in micro-electronics, micro-electromechanical or photovoltaic systems, a more precise control and understanding of the electrochemical oxidation process could broaden its applications in terms of electropolishing, coating or surface pattering. We have investigated the formation mechanism of such nanoporous silica films in detail by measuring the mechanical stress evolution in the oxide film in-situ during its growth under different electrochemical conditions. Internal stress data have been obtained by combining in-situ high resolution curvature measurements, performed with a multi-beam optical sensor, and in-situ oxide thickness measurements, obtained by spectroscopic ellipsometry. As such, we have been able to asses the role of internal stress on periodic morphological transformations occuring during anodising. Furthermore, we will also report on the concurrent evolution of the optical properties of such electrochemically grown nanoporous silica.
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Blaffart, F., Sbille, I., Santoro, R., & Proost, J. (2011). In-situ monitoring of the electrochemical growth of nanoporous silica. Proceedings of the 2011 European Materials Research Society Spring Meeting, Symposium on the Synthesis, Processing and Characterization of Nanoscale Multi-functional Oxide Films, p. Abstract #P3-29. https://hdl.handle.net/2078.5/226074