Design of a Miniaturized Accelerometer with 200 nm Capacitive Sensing Gap
(2011) ICT.Open Conference — Location: Veldhoven (the Netherlands) (14.November.2011)
Files
No attached file found for this publication.
Details
- Authors
- Affiliations
Citations
Ray Chaudhuri, A., Severi, S., Erismis, M. A., Francis, L., & Witvrouw, A. (2011). Design of a Miniaturized Accelerometer with 200 nm Capacitive Sensing Gap. Proceedings of the ICT.Open Conference. ICT.Open Conference, Veldhoven (the Netherlands). https://hdl.handle.net/2078.5/253398