V-groove-isolated i.i.l. circuits

Declercq, M.J.;De Moor, J.P.;Jespers, P.G.;Sevrin, A.M.
(1976) Electronics Letters — Vol. 12, n° 6, p. 150-151 (1976)

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Authors
  • Declercq, M.J.
    Author
  • De Moor, J.P.
    Author
  • Jespers, P.G.
    Author
  • Sevrin, A.M.
    Author
Abstract
A new method using V-grooves for dielectric isolation of i.i.l. circuits is described. Basic devices and circuits have been realised and tested. The process results in a simplified, low-temperature isolation step and yields an increased packing density.
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Declercq, M. J., De Moor, J. P., Jespers, P. G., & Sevrin, A. M. (1976). V-groove-isolated i.i.l. circuits. Electronics Letters, 12(6), 150-151. https://hdl.handle.net/2078.5/67735 (Original work published 1976)