Effect of Cu on Al interfacial mass transport in bamboo RIE and damascene Al(Cu)
(1999) Materials Research Society Symposium — Location: San Francisco - CA (1999)
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Proost, J., Li, H., Witvrouw, A., & Maex, K. (1999). Effect of Cu on Al interfacial mass transport in bamboo RIE and damascene Al(Cu). Proceedings, p. 563, 91. https://hdl.handle.net/2078.5/221603