The influence of primary ion nature and energy on ISS polar plots is studied experimentally and by simulation for scattering on a Cu(110) surface. The scattering of He and Ne ions in the energy range 1-3 keV is determined by the sampling depth of these ions. Simulations performed with the MARLOWE code show that helium ions analyse a large depth into the crystal while neon ions analyse the very first few atomic layers only.
Houssiau, L., & Bertrand, P. (1994). Surface-structure Analysis By Time-of-flight Iss - Influence of Primary Ion Nature and Energy for Scattering On Cu(110). Vacuum : surface engineering, surface instrumentation & vacuum technology, 45(4), 409-412. https://doi.org/10.1016/0042-207X(94)90310-7 (Original work published 1994)