CMOS compatible out-of-plane & in-plane magnetometers
(2007) TRANSDUCERS ’07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems — Location: Lyon, France (10.June.2007)
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- Abstract
- Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in Delta V changes thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. Ferromagnetic nickel plates also show 20 mu m- vertical deflection in magnetic field non-aligned with the residual magnetization.
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Citations
El Ghorba, M., André, N., Sobieski, S., & Raskin, J.-P. (2007). CMOS compatible out-of-plane & in-plane magnetometers. TRANSDUCERS ’07 & Eurosensors XXI. 2007 14th International Conferenceon Solid-State Sensors, Actuators and Microsystems, p. 2373-2376. https://hdl.handle.net/2078.5/272246