A Tunable Palladium-Based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-Low Power Sensing
(2014) EUROSENSORS 2014 — Location: Brescia (Italie) (7.September.2014)
Files
Poster_Eurosensors.pdf
Restricted Access - Adobe PDF
- 1.51 MB
Details
- Authors
- Abstract
- We developed an ultra-low power MEMS hydrogen (H2) sensor performing high dynamics together with high sensitivity up to the Lower Explosive Limit (LEL), i.e. 4 % vol. H2 in dry air. The architecture consists of Al clamped-clamped beams (700 nm-thick, 800 μm-total width, 140 or 240 μm-length) with both ends made of a Pd/Al bimorph (200/700 nm-thick) on a quarter of its length, acting as actuators, released above a split-bottom electrode. The initial stress defines the initial deflection of the structure while the Pd-hydriding induces compressive stress variation in the Pd actuator layer and therefore the membrane deflection. A capacitive transduction is used to continuously measure the gap variation due to the H2 absorption and hydriding kinetic. Results show a fast response time of less than 5 s for an effective concentration of about 0.2 % vol. H2 in dry air or N2 mixture, with no cross sensitivity.
- Affiliations
Citations
Walewyns, T., Spirito, D., & Francis, L. (2014). A Tunable Palladium-Based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-Low Power Sensing. EUROSENSORS 2014, Brescia (Italie). https://hdl.handle.net/2078.5/252789