Towards MEMS Fabrication by Silicon Electrochemical Micromachining Technology

Bassu, Margherita;Strambini, Lucanos Marsilio;Barillaro, Giuseppe
(2011) Proceedings of AISEM 2011, 16th Italian Conference on Sensors and Microsystems promoted by the Italian Association on Sensors and Microsystems — Location: Casaccia - Rome (Italie) (7.February.2011)

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  • Bassu, MargheritaUCLouvain
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  • Strambini, Lucanos MarsilioUniversiti di Pisa, Italy
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  • Barillaro, GiuseppeUniversiti di Pisa, Italy
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Bassu, M., Strambini, L. M., & Barillaro, G. (2011). Towards MEMS Fabrication by Silicon Electrochemical Micromachining Technology. Proceedings of AISEM 2011, 16th Italian Conference on Sensors and Microsystems promoted by the Italian Association on Sensors and Microsystems, Casaccia - Rome (Italie). https://hdl.handle.net/2078.5/252463