MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements
(2006) Optics Communications — Vol. 263, n° 1, p. 6-11 (2006)
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- Abstract
- A white light interferometer can be used to measure profiles of a few nanometers and is therefore particularly well adapted for micro electro mechanical systems characterization. We present theoretical and experimental results on the profile precision as a function of the light source spectrum. We demonstrate that even if a broadband source is used in the phase shifting mode, the knowledge of the light spectrum allows to calculate a correction factor. This factor determines the local effective wavelength and can be used in order to increase the measurement precision of sample profiles. (c) 2006 Elsevier B.V. All rights reserved.
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Jorez, S., Cornet, A., & Raskin, J.-P. (2006). MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements. Optics Communications, 263(1), 6-11. https://doi.org/10.1016/j.optcom.2006.01.005 (Original work published 2006)