Microsystems in SOI Technology
(2001) Electralis 2001 — Location: THe Campus, Liège (Belgium) (14.March.2001)
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- Abstract
- The main objective of the joint project between Microelectronics and Microwave Laboratories of UCL is related to the development and characterization of new CMOS-compatible microfabrication processes in order to build sensors, actuators and electronics on the same chip. Our first theorical and experimental investigations in SOI CMOS technology, in the new world of micromachining techniques, demonstrate the immense interests of these technologies and of their co-integration for present and future applications in RF communications, micromechanics, biomedical engineering, etc.
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Citations
Laconte, J., Akheyar, A., Flandre, D., & Raskin, J.-P. (2001). Microsystems in SOI Technology. Electralis 2001, THe Campus, Liège (Belgium). https://hdl.handle.net/2078.5/228226