A Silicon-on-Insulator Platform Functionalized By Atomic Layer Deposition for Humidity Sensing

André, Nicolas;Pollissard, Guillaume;Couniot, Numa;Gérard, Pierre;Flandre, Denis;et.al.
(2014) Winfab Scientific Day — Location: Louvain-la-neuve (Belgium) (17.October.2014)

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André, N., Pollissard, G., Couniot, N., Gérard, P., Ali, Z. S., Udrea, F., Francis, L., & Flandre, D. (2014). A Silicon-on-Insulator Platform Functionalized By Atomic Layer Deposition for Humidity Sensing. Winfab Scientific Day, Louvain-la-neuve (Belgium). https://hdl.handle.net/2078.5/272188