Electrical Performances Comparison of Semi and Fully Recessed Isolation Structures

Dubois, E.;Coppee, JL.;Baccus, B.;Collard, D.
(1988) Journal de Physique — Vol. 49, n° C-4, p. 813-816 (1988)

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  • Dubois, E.
    Author
  • Coppee, JL.
    Author
  • Baccus, B.
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  • Collard, D.
    Author
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Dubois, E., Coppee, JL., Baccus, B., & Collard, D. (1988). Electrical Performances Comparison of Semi and Fully Recessed Isolation Structures. Journal de Physique, 49(C-4), 813-816. https://doi.org/10.1051/jphys:01988004905081300 (Original work published 1988)