Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures
(2009) Workshop on Templated Self-Organization: processing, characterization and modeling — Location: Stuttgart (Germany) (25.June.2009)
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Tang, X., Ravau, F., Dubois, E., Kasper, E., Karmous, A., Reckinger, N., & Raskin, J.-P. (2009). Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures. Proceedings of the Workshop on Templated Self-Organization: processing, characterization and modeling. Published. Workshop on Templated Self-Organization: processing, characterization and modeling, Stuttgart (Germany). https://hdl.handle.net/2078.5/230588