60 GHz tunable cavity resonator with an incorporated MEMS based small perturbation
(2009) MEMSWAVE 2009 conference — Location: Trento, Italy (6.July.2009)
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Dancila, D., Ekkels, P., Simon, P., Jourdain, A., Phommahaxay, A., Rottenberg, X., Huynen, I., De Raedt, W., & Tilmans, H. A. C. (2009). 60 GHz tunable cavity resonator with an incorporated MEMS based small perturbation. MEMSWAVE 2009 conference, Trento, Italy. https://hdl.handle.net/2078.5/255308