In-situ study of the stiffness of alumina thin films during vapor deposition

Proost, Joris;Spaepen, F.
(2001) Mater. Res. Soc. Symposium on Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures — Location: San Francisco - CA (2001)

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Proost, J., & Spaepen, F. (2001). In-situ study of the stiffness of alumina thin films during vapor deposition. Proceedings, p. 672, O.9.9. https://hdl.handle.net/2078.5/228638