Integrated microwave inductors on Silicon-on-Insulator substrates

Huynen, Isabelle;Raskin, Jean-Pierre;Gillon, Renaud;Vanhoenacker-Janvier, Danielle;Colinge, Jean-Pierre
(1997) 27th European Microwave Conference, EuMC ’97 — Location: Jérusalem, Israël (5.September.1997)

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This paper presents a new wideband analysis method for integrated spiral and meander inductors on semiconductor substrates. This method is based on the evaluation of the parameters of the coupled lines constituting the inductors by a newly-developed variational expression and has been validated by measurements. Its purpose is to optimize the design of integrated inductors in order to obtain adequate values for matching and resonant circuits in the frequency range 1-10 GHz.
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Huynen, I., Raskin, J.-P., Gillon, R., Vanhoenacker-Janvier, D., & Colinge, J.-P. (1997). Integrated microwave inductors on Silicon-on-Insulator substrates. Proceedings of the 27th European Microwave Conference, EuMC ’97, pp. 1008-1013. https://doi.org/10.1109/EUMA.1997.337928