Advances in Electrochemical Micromachining of Silicon:Towards MEMS Fabrication

Bassu, Margherita;Strambini, Lucanos Marsilio;Barillaro, Giuseppe
(2011) Proceedings of EUROSENSORS XXV — Location: Athènes (Grèce) (4.September.2011)

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  • Bassu, MargheritaUCLouvain
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  • Strambini, Lucanos MarsilioUniversiti di Pisa, Italy
    Author
  • Barillaro, GiuseppeUniversiti di Pisa, Italy
    Author
Abstract
In this work, a significant step towards the fabrication of very high aspect-ratio complex microsystems by silicon electrochemical micromachining in HF-based electrolytes (ECM) is given. High aspect-ratio MEMS structures, with different shape and dimensions, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology.
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Bassu, M., Strambini, L. M., & Barillaro, G. (2011). Advances in Electrochemical Micromachining of Silicon:Towards MEMS Fabrication. Proceedings of EUROSENSORS XXV, Athènes (Grèce). https://hdl.handle.net/2078.5/253341