Transmission electron microscopy study of erbium silicide formation using Pt/Er stack on a thin silicon-on-insulator substrate
(2004) 13th European Microscopy Congress 2004 — Location: Antwerpen (Belgium) (22.August.2004)
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Laszcz, A., Katcki, J., Ratajczak, J., Tang, X., & Dubois, E. (2004). Transmission electron microscopy study of erbium silicide formation using Pt/Er stack on a thin silicon-on-insulator substrate. 13th European Microscopy Congress 2004, Antwerpen (Belgium). https://hdl.handle.net/2078.5/231816