Three-dimensional microsystems co-integrated with SOI-CMOS circuit technology: from MEMS to NEMS
(2006) IEEE International Conference on Nano/Micro Egineered and Molecular Systems — Location: Zhuhai, China (18.January.2006)
Files
No attached file found for this publication.
Details
- Authors
- Affiliations
Citations
Iker, F., André, N., & Raskin, J.-P. (2006). Three-dimensional microsystems co-integrated with SOI-CMOS circuit technology: from MEMS to NEMS. Proceedings of the IEEE International Conference on Nano/Micro Egineered and Molecular Systems, p. Session 3E4.1-Paper 362. https://hdl.handle.net/2078.5/272254