Study of the Plasma-Polyethylene Interactions in the Case of SF6 and SF6-CF4 Non-Equilibrium Discharges

Khairallah-Abdelnour, Y;Arefi-Khonsari, Farzi;Amouroux, Jacques;Léonard, Didier;Bertrand, Patrick
(1995) 12th International Symposium on Plasma Chemistry ISPC 12 — Location: Minneapolis MN - USA (21.August.1995)

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  • Khairallah-Abdelnour, YENSC Paris
    Author
  • Arefi-Khonsari, FarziENSC Paris
    Author
  • Amouroux, JacquesENSC Paris
    Author
  • Léonard, DidierUCLouvain
    Author
  • Bertrand, PatrickUCLouvain
    Author
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Khairallah-Abdelnour, Y., Arefi-Khonsari, F., Amouroux, J., Léonard, D., & Bertrand, P. (1995). Study of the Plasma-Polyethylene Interactions in the Case of SF6 and SF6-CF4 Non-Equilibrium Discharges. In J.V. Heberlein, D.W. Ernie, J. T. Roberts (ed.), Proceedings of the 12th International Symposium on Plasma Chemistry ISPC 12 (p. p. 117-122). Univ. of Minnesota. https://hdl.handle.net/2078.5/221591