A new on chip nanomechanical testing method

Pardoen, Thomas;Safi, Asmahan;Houri, Samer;Coulombier, Michaël;Raskin, Jean-Pierre;et.al.
(2008) Observatory for Micro & NanoTechnologies - Nanomechanics for NEMS: scientific and technological issues — Location: Grenoble, France (26.June.2008)

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Pardoen, T., Safi, A., Houri, S., Coulombier, M., Gravier, S., André, N., Carbonnelle, P., & Raskin, J.-P. (2008). A new on chip nanomechanical testing method. Proceedings of the Observatory for Micro & NanoTechnologies - Nanomechanics for NEMS: scientific and technological issues. Published. Observatory for Micro & NanoTechnologies - Nanomechanics for NEMS: scientific and technological issues, Grenoble, France. https://hdl.handle.net/2078.5/272235