Measurement and Characterization of Organic Contamination on Silicon Wafers and in Cleanrooms
(1996) Clean Rooms International — p. S10-S12 (1996)
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Storm, W., Vandervorst, W., Heyns, M., Poleunis, C., & Bertrand, P. (1996). Measurement and Characterization of Organic Contamination on Silicon Wafers and in Cleanrooms. Clean Rooms International, S10-S12. https://hdl.handle.net/2078.5/91908 (Original work published 1996)