Grain-size and Resistivity of Lpcvd Polycrystalline Silicon Films
(1981) Journal of the Electrochemical Society — Vol. 128, n° 9, p. 2009-2014 (1981)
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- Authors
Delannay, Francis 
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Colinge, JP., Demoulin, E., Delannay, F., Lobet, M., & Temerson, JM. (1981). Grain-size and Resistivity of Lpcvd Polycrystalline Silicon Films. Journal of the Electrochemical Society, 128(9), 2009-2014. https://doi.org/10.1149/1.2127785 (Original work published 1981)