Introduction aux micro-systèmes (MEMS)

Raskin, Jean-Pierre
(2001) Micro & Nano: What challenges for the industry?, Workshop — Location: Louvain-la-Neuve, Belgium (28.September.2001)

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Raskin, J.-P. (2001). Introduction aux micro-systèmes (MEMS). Proceedings of the Micro & Nano: What challenges for the industry?, Workshop, pp. 1-65. https://hdl.handle.net/2078.5/229192