Steady-state measurement of the interface fracture resistance in wafer bonding

Bertholet, Yannick;Iker, François;Zhang, Xuan Xiong;Raskin, Jean-Pierre;Pardoen, Thomas
(2004) 15th European Conference of Fracture — Location: Stockholm, Sweden

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Bertholet, Y., Iker, F., Zhang, X. X., Raskin, J.-P., & Pardoen, T. (2004). Steady-state measurement of the interface fracture resistance in wafer bonding. Proceedings of the 15th European Conference of Fracture. Published. 15th European Conference of Fracture, Stockholm, Sweden. https://hdl.handle.net/2078.5/230685