Modelling and characterisation of an ortho-planar micro-valve

Smal, Olivier;Dehez, Bruno;Raucent, Benoît
(2006) International Precision Assembly Seminar (IPAS′06) — Location: Bad Hofgastein (Austria) (19.February.2006)

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Smal, O., Dehez, B., & Raucent, B. (2006). Modelling and characterisation of an ortho-planar micro-valve. Proceedings of International Precision Assembly Seminar. International Precision Assembly Seminar (IPAS′06), Bad Hofgastein (Austria). https://hdl.handle.net/2078.5/25749