Substrate crosstalk reduction using a passivation barrier on oxidized high-resistivity Si substrates

Roda Neve, Cesar;Lederer, Dimitri;Raskin, Jean-Pierre
(2009) Fifth Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’09 — Location: Göteborg, Sweden (19.January.2009)

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Roda Neve, C., Lederer, D., & Raskin, J.-P. (2009). Substrate crosstalk reduction using a passivation barrier on oxidized high-resistivity Si substrates. Proceedings of the Fifth Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’09, pp. 119-120. https://hdl.handle.net/2078.5/230766