Rapid thermal annealing of electroplated Cu films
(1999) Mater. Res. Soc. Conference on Advanced Metallization and Interconnect Systems for ULSI Applications (1999)
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Beyer, G. P., Kitabjian, P., Brongersma, S. H., Proost, J., Bender, H., Richard, E., Vervoort, I., Hey, P., Zhang, P., & Maex, K. (1999). Rapid thermal annealing of electroplated Cu films. Proceedings, p. 167. https://hdl.handle.net/2078.5/230847