Programmable low-power low-noise capacitance to voltage converter for MEMS accelerometers
(2016) Sensors — Vol. 17, n° 12, p. 67 (2016)
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- Abstract
- In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/√Hz at 50 kHz, which corresponds to 100 μg/√Hz.
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Royo, G., Sánchez-Azqueta, C., Gimeno Gasca, C., Aldea, C., & Celma, S. (2016). Programmable low-power low-noise capacitance to voltage converter for MEMS accelerometers. Sensors, 17(12), 67. https://doi.org/10.3390/s17010067 (Original work published 2016)