Rbs Study of the Effect of Arsenic and Phosphorus Interfacial Segregation Upon the Sintering of Contacts Between Implanted Polycrystalline Silicon and Aluminum-silicon(1-percent)

Herbots, N., Lobet, M., & Vandewiele, F. (1985). Rbs Study of the Effect of Arsenic and Phosphorus Interfacial Segregation Upon the Sintering of Contacts Between Implanted Polycrystalline Silicon and Aluminum-silicon(1-percent). Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 7-8(MAR), 278-286. https://doi.org/10.1016/0168-583X(85)90566-X (Original work published 1985)