Study of the Sputter Rate of Thin Aluminum Layers Deposited On Polymer (pet) Substrates

Depuydt, Y.; Bertrand, Patrick

doi:10.1016/0168-583X(89)90746-5

Study of the Sputter Rate of Thin Aluminum Layers Deposited On Polymer (pet) Substrates

Depuydt, Y.

;

Bertrand, Patrick

(1989) Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms — Vol. 39, n° 1-4, p. 86-90 (1989)

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Authors

Depuydt, Y.
Author
Bertrand, PatrickUCLouvain
Author

Affiliations

UCLouvainFSA/MAPR - Département des sciences des matériaux et des procédés

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Depuydt, Y., & Bertrand, P. (1989). Study of the Sputter Rate of Thin Aluminum Layers Deposited On Polymer (pet) Substrates. Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 39(1-4), 86-90. https://doi.org/10.1016/0168-583X(89)90746-5 (Original work published 1989)