Thermal mismatch stress analysis of high-temperature deposited polysilicon cantilever-beam
(2019) ANSYS Convergence — Location: Mexico (Mexico) (1.October.2019)
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Velosa-Moncada, L. A., Raskin, J.-P., Aguilera-Cortés, L. A., & Herrera-May, A. L. (2019). Thermal mismatch stress analysis of high-temperature deposited polysilicon cantilever-beam. ANSYS Convergence, Mexico (Mexico). https://hdl.handle.net/2078.5/227944