Development and characterization of microsystems in thin film SOI technology

Iker, François;Raskin, Jean-Pierre
(2002) Union Radio-Scientifique Internationale (U.R.S.I.) — Location: Brussels, Belgium (13.December.2002)

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Iker, F., & Raskin, J.-P. (2002). Development and characterization of microsystems in thin film SOI technology. Proceedings of the Union Radio-Scientifique Internationale (U.R.S.I.), p. 1 page. https://hdl.handle.net/2078.5/229283