In-situ internal stress measurements during sputter deposition of metallic oxide thin films for photovoltaic applications

Michotte, Sébastien;Proost, Joris
(2010) 5th Forum of New Materials Solutions for Sustainable Energy, Symposium Photovoltaic Solar Energy Conversion : Materials and Technology Challenges — Location: Montecatini (2010)

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Michotte, S., & Proost, J. (2010). In-situ internal stress measurements during sputter deposition of metallic oxide thin films for photovoltaic applications. Proceedings, p. FG_2:L07,73. https://hdl.handle.net/2078.5/230818