Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures
(2009) 35th International Conference on Micro & Nano Engineering – MNE’09 — Location: Ghent (Belgium) (28.September.2009)
Files
No attached file found for this publication.
Details
- Authors
- Affiliations
Citations
Tang, X., Ravau, F., Dubois, E., Kasper, E., Karmous, A., Reckinger, N., & Raskin, J.-P. (2009). Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures. Proceedings of the 35th International Conference on Micro & Nano Engineering – MNE’09, p. paper P-NANO-60. https://hdl.handle.net/2078.5/253237