Internal stress actuated micro- and nanomachines for testing physical properties of micro- and nano-sized material samples
(2007)
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- Authors
- Abstract
- This invention provides an internal stress actuated micro- or nano- machine for measuring mechanical and/or electrical properties, e.g. traction measurement, compression measurement or shear measurement, on micro- scale and nano-scale films or multi-layers of materials such as metallic materials, carbon-based materials and silicon-base materials. The device of the invention has applications in materials production industry, as well as in micro-electronics and for surface treatments and functionalization.
- Affiliations
Citations
Pardoen, T., Fabrègue, D., Raskin, J.-P., André, N., & Coulombier, M. (2007). Internal stress actuated micro- and nanomachines for testing physical properties of micro- and nano-sized material samples (Patent No. PCT/BE2007/000017). https://hdl.handle.net/2078.5/272257