Fracture resistance of interfaces in bonded silicon wafers

Bertholet, Y.;Iker, François;Zhang, Xuan Xiong;Raskin, Jean-Pierre;Pardoen, Thomas
(2004) 15th European Conference of Fracture — Location: Stockholm, Sweden (11.August.2004)

Files

No attached file found for this publication.

Details

Authors
Affiliations

Citations

  • APA
  • Chicago
  • FWB

Bertholet, Y., Iker, F., Zhang, X. X., Raskin, J.-P., & Pardoen, T. (2004). Fracture resistance of interfaces in bonded silicon wafers. Proceedings of the 15th European Conference of Fracture, p. Paper ECF15, 9 pages. https://hdl.handle.net/2078.5/230692