Performance of Coplanar waveguides on surface passivated highly resistive silicon covered by ferroelectric film

Kuylenstierna, D.;Norling, M.;Vorobiev, A.;Reimann, K.;Gevorgian, S.;et.al.
(2007) IEEE MTT-S International Microwave Symposium – IMS’07 — Location: Honolulu, Hawaii (3.June.2007)

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  • Kuylenstierna, D.Chalmers University of Technology, Göteborg, Swede,
    Author
  • Norling, M.Chalmers University of Technology, Göteborg, Swede,
    Author
  • Vorobiev, A.Chalmers University of Technology, Göteborg, Swede,
    Author
  • Reimann, K.Chalmers University of Technology, Göteborg, Swede,
    Author
  • Lederer, DimitriUCLouvain
    Author
  • Raskin, Jean-PierreUCLouvain
    Author
  • Gevorgian, S.Chalmers University of Technology, Göteborg, Swede,
    Author
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Abstract
Coplanar waveguides (CPWs) on surface passivated highly resistive Si (HRS) covered by ferroelectric film are studied. The focus is on passivation techniques reducing losses caused by surface charge accumulation at the Si/SiO2 interface. Different passivation methods are considered, Ar-ion bombardment into the silicon substrate and deposition of poly-Si below the oxide layer. Both methods remove any bias-dependence and decrease the losses associated with surface charge accumulation. It is also concluded that the effect of passivation remains after pulsed laser deposition of a ferroelectric thin film.
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Kuylenstierna, D., Norling, M., Vorobiev, A., Reimann, K., Lederer, D., Raskin, J.-P., & Gevorgian, S. (2007). Performance of Coplanar waveguides on surface passivated highly resistive silicon covered by ferroelectric film. Proceedings of the ”, IEEE MTT-S International Microwave Symposium – IMS’07, pp. 2055-2058. https://hdl.handle.net/2078.5/229253