Direct silicon bonding dynamics: a coupled fluid/structure analysis
(2013) WaferBond′13 — Location: Stockhom, Suède (5.December.2013)
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Navarro, E., Bréchet, Y., Moreau, R., Pardoen, T., Raskin, J.-P., Barthelemy, A., & Radu, I. (2013). Direct silicon bonding dynamics: a coupled fluid/structure analysis. Proceedings of WaferBond′13. Published. WaferBond′13, Stockhom, Suède. https://hdl.handle.net/2078.5/229916