Static fracture toughness and environmentally assisted cracking in thin freestanding SiO2 and SiN films using crack-on-chip testing

Jaddi, S., Coulombier, M., Raskin, J.-P., & Pardoen, T. (2021). Static fracture toughness and environmentally assisted cracking in thin freestanding SiO2 and SiN films using crack-on-chip testing. The 2021 Spring Meeting of the European Materials Research Society (E-MRS), Virtual conference. https://hdl.handle.net/2078.5/229613