In-situ study of the growth stress and stiffness of alumina thin films during vapor deposition

Proost, Joris;Spaepen, F.
(2002) 14th U.S. National Congress of Applied Mechanics, Symposium on Mechanics of Thin Films and Other Small Structures — Location: Blacksburg - VA (2002)

Files

No attached file found for this publication.

Details

Authors
Affiliations

Citations

  • APA
  • Chicago
  • FWB

Proost, J., & Spaepen, F. (2002). In-situ study of the growth stress and stiffness of alumina thin films during vapor deposition. Proceedings, p. 473. https://hdl.handle.net/2078.5/220674