CMOS compatible 2-D self-assembled MEMS in thin film SOI technology

Iker, François;Si Moussa, Mehdi;André, Nicolas;Pardoen, Thomas;Raskin, Jean-Pierre
(2005) Union Radio-Scientifique Internationale (U.R.S.I.) — Location: Brussels, Belgium (10.December.2005)

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Iker, F., Si Moussa, M., André, N., Pardoen, T., & Raskin, J.-P. (2005). CMOS compatible 2-D self-assembled MEMS in thin film SOI technology. Proceedings of the Union Radio-Scientifique Internationale (U.R.S.I.), p. 59. https://hdl.handle.net/2078.5/272265