We report the fabrication of junctionless SOI MOSFETs. Such devices greatly simplify processing thermal budget and behave as regular multigate SOI transistors.
Colinge, J.-P., Lee, C.-W., Afzalian, A., Dehdashti, N., Yan, R., Ferain, I., Razavi, P., O’Neill, B., Blake, A., White, M., Kelleher, A. M., McCarthy, B., & Murphy, R. (2009). SOI Gated Resistor: CMOS without Junctions. Proceedings of the 2009 IEEE International SOI Conference, 2 pages. https://hdl.handle.net/2078.5/252700