FilesNo attached file found for this publication.DetailsAuthorsNève, AmauryUCLouvainInventorRaskin, Jean-PierreUCLouvainInventorFlandre, DenisUCLouvainInventorAffiliationsUCLouvainFSA/ELEC - Département d'électricitéShow moreCitations APA Chicago FWB Nève, A., Raskin, J.-P., & Flandre, D. (2002). Fabrication method of semiconductor devices (Patent No. PCT/BE02/00043). https://hdl.handle.net/2078.5/255455