The Development of Cmos/simox Technology

Colinge, JP.
(1995) 9th Biennial Conference on Insulating Films on Semiconductors (INFOS 95) — Location: VILLARD DE LANS(France) (7.June.1995)

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  • Colinge, JP.
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Colinge, JP. (1995). The Development of Cmos/simox Technology. Microelectronic Engineering, 28(1-4), 423-430. https://doi.org/10.1016/0167-9317(95)00089-Q (Original work published 1995)