Thermal polarization and depolarization processes in BOX of SOI SIMOX structures
(1996) International Electrochemical Society meeting and Symposium on “Silicon-on-Insulator Technology and Devices” — Location: Los Angeles (USA) (5.May.1996)
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Nazarov, A., Barchuk, I. P., & Kilchytska, V. (1996). Thermal polarization and depolarization processes in BOX of SOI SIMOX structures. Proceedings of the 7th International Electrochemical Society meeting and Symposium on “Silicon-on-Insulator Technology and Devices”, 302-310. https://hdl.handle.net/2078.5/253172