High precision interferometric measurements with broad spectral sources : applications for MEMS pofilometry

Cornet, Alain;Antoine, Philippe;Raskin, Jean-Pierre
(2007) 3rd Workshop on Optical Measurements Techniques OPTIMESS — Location: Leuven

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Cornet, A., Antoine, P., & Raskin, J.-P. (2007). High precision interferometric measurements with broad spectral sources : applications for MEMS pofilometry. 3rd Workshop on Optical Measurements Techniques OPTIMESS, Leuven. https://hdl.handle.net/2078.5/231033