High precision interferometric measurements with broad spectral sources : applications for MEMS pofilometryCornet, Alain;Antoine, Philippe;Raskin, Jean-Pierre(2007) 3rd Workshop on Optical Measurements Techniques OPTIMESS — Location: Leuven
FilesNo attached file found for this publication.DetailsAuthorsCornet, AlainUCLouvainAuthorAntoine, PhilippeUCLouvainAuthorRaskin, Jean-PierreUCLouvainAuthorAffiliationsUCLouvainSC/PHYS - Département de physiqueUCLouvainFSA/ELEC - Département d'électricitéShow moreCitations APA Chicago FWB Cornet, A., Antoine, P., & Raskin, J.-P. (2007). High precision interferometric measurements with broad spectral sources : applications for MEMS pofilometry. 3rd Workshop on Optical Measurements Techniques OPTIMESS, Leuven. https://hdl.handle.net/2078.5/231033