A sensor for detecting the presence of predetermined chemical/biological molecules, the sensor having a MOSFET device (2,3,6,7,9,10,12,13), the gate having an array of nanoscale fingers (6,7), and on fingers or in spaces between the fingers, chemical/biological receptor molecules (15) suitable for selectively binding with the predetermined chemical/biological molecules, the sensor also having circuitry (4,5,11,12 ) for measuring a change in a change in drain current of the FET caused by the predetermined chemical/biological molecules becoming bound to the receptor molecules. Sensitivity and reliability can be increased compared to capacitive sensors.
Demeersman, B., Godfroid, E., Jacquet, A., Prévot, P.-P., Tang, X., Demoustier, S., Jonas, A., Bayot, V., Nysten, B., & Blondeau, F. (2009). Method and device for high sensitivity and quantitative detection of chemical/biological molecules (Patent No. EP2017609). https://hdl.handle.net/2078.5/270331